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Marathon® CP-20 Cryopump

Available Configurations

  • Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-20 Cryopump
  • F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.)  Cold Head Cable
  • Tool Kit

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About the Marathon® CP-20

The Marathon CP-20 Cryopump is SHI’s largest cryopump in the Marathon CP series.  It utilizes SHI’s CH-210 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with water-cooled helium compressors.


Pumping SpeedAir9,700 liters/second
Water29,100 liters/second
Argon8,300 liters/second
Hydrogen14,000 liters/second
ThroughputArgon11.3 torr-liters/second
(895 sccm)
(at 1×10-6 torr)
6,000 standard liters
(at 5×10-6 torr)
33 standard liters
Crossover Rating400 torr-liters
Cooldown Time to 20 K190 Minutes
Weight77.1 kg (170 lbs.)
Dimensions (H)569 mm (22.4 in.)
Maintenance13,000 Hours

Specifications subject to change without notice

Compressor Options

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