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SICERA® Smart KZ-12 Cryopump

Standard Scope of Supply

  • KZ-12 Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KZ-12

The SICERA® Smart KZ-12 Cryopump is the largest model in SHI’s SICERA Smart series.  With versions specially designed for PVD or ion implantation applications, the KZ-12’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.


ModelKZ-12 for PVDKZ-12 for Ion Implant
Pumping SpeedWater11,000 liters/second
Argon1,900 liters/second3,470 liters/second
Nitrogen2,300 liters/second4,470 liters/second
Hydrogen1,800 liters/second11,330 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)1.5 Pa•m3/s (900 sccm)
CapacityArgon3,500 standard liters-
Hydrogen16 standard liters35 standard liters
Base Pressure<1.0E-6 Pa<5.0E-6 Pa
Cooldown Time to 20 K≤135 Minutes≤170 Minutes
Warmup Time to 290 K1≤55 Minutes≤35 Minutes2
Weight55 kg (121.3 lbs.)32 kg (70.5 lbs.)
Dimensions (LxWxH)735 x 425 x 493 mm
(28.9 x 16.7 x 19.4 in.)
673 x 463 x 450 mm
(26.5 x 18.2 x 17.7 in.)
Inlet FlangeISO 320 (bolted flange connection)ISO 320 (clamped flange connection)
Maintenance16,000 Hours
1 The supply pressure of the N2 purge is 0.55MPaG. There are no condensed gasses.
2 Warmup time to 280 K, if gas is not absorbed.

Specifications subject to change without notice

Compressor Options

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