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Marathon® CP-250LP Cryopump

Available Configurations

  • Standard Low Profile Design in Left or Right Hand Configurations
  • Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Two (2) cryopumps operating with one (1) F-70L/H Compressor
  • Displex® Technology

Standard Scope of Supply

  • CP-250LP Cryopump
  • F-20L, F-70L/H or Zephyr® Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.)  Cold Head Cable
  • Tool Kit

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About the Marathon® CP-250LP

The Marathon CP-250LP Cryopump is the larger of SHI’s two low-profile Marathon CP Cryopumps.  It utilizes SHI’s CH-204 10K Cryocooler and features Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with both air and water-cooled helium compressors.

Specifications

Pumping SpeedAir3,000 liters/second
Water6,300 liters/second
Argon2,500 liters/second
Hydrogen5,000 liters/second
ThroughputArgon11.0 torr-liters/second
(870 sccm)
CapacityArgon
(at 1×10-6 torr)
1,600 standard liters
Hydrogen
(at 5×10-6 torr)
30 standard liters
Crossover Rating300 torr-liters
Cooldown Time to 20 K110 Minutes
Weight20.0 kg (44.0 lbs.)
Dimensions (HxL)181 x 591 mm
(7.2 x 23.2 in.)
Maintenance13,000 Hours

Specifications subject to change without notice

Compressor Options

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