Home // Products // Cryopumps // SICERA® Cryopumps and Cold Traps // SICERA® Ultra KV-10 Cryopump

SICERA® Ultra KV-10 Cryopump

Standard Scope of Supply

  • KV-10 Cryopump
  • TM-30 or TM-50 Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

Interested in this product? Please Call Your Local Office for More Information.

Find Your Local OfficeRequest a Quote

About the KV-10

The SICERA® Ultra KV-10 Cryopump is the mid-size model in SHI’s SICERA Ultra series, and is designed for PVD applications.  The KV-10 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model. 

Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.



Pumping SpeedWater6,500 liters/second
Argon1,900 liters/second
Nitrogen2,300 liters/second
Hydrogen1,800 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)
CapacityArgon2,000 standard liters
Hydrogen16 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<5.0E-6 Pa
Cooldown Time to 20 K1≤85 Minutes
Warmup Time to 290 K1≤45 Minutes
Weight31 kg (68.3 lbs.)
Dimensions (LxWxH)654 x 335 x 454 mm
(25.7 x 13.2 x 17.9 in.)
Inlet FlangeISO 250 (bolted flange connection)
1 Regardless of number of cryopumps operating.

Specifications subject to change without notice

Compressor Options

Our Products Speak For Themselves

Reach out today to see what they can do for you.

Contact Us