About the KV-10
The SICERA® Ultra KV-10 Cryopump is the mid-size model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-10 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
|Pumping Speed||Water||6,500 liters/second|
|Throughput||Argon||1.2 Pa•m3/s (700 sccm)|
|Capacity||Argon||2,000 standard liters|
|Hydrogen||16 standard liters|
|Crossover Rating||20.0 Pa•m3|
|Base Pressure||<5.0E-6 Pa|
|Cooldown Time to 20 K1||≤85 Minutes|
|Warmup Time to 290 K1||≤45 Minutes|
|Weight||31 kg (68.3 lbs.)|
|Dimensions (LxWxH)||654 x 335 x 454 mm
(25.7 x 13.2 x 17.9 in.)
|Inlet Flange||ISO 250 (bolted flange connection)|
Specifications subject to change without notice