SICERA® Smart KZ-08 In-Line Cold Trap (Thin Type)
Standard Scope of Supply
- KZ-08 In-Line Cold Trap (Thin Type)
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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The SICERA® Smart KZ-08 In-Line Cold Trap is the only thin-type Cold Trap model in SHI’s SICERA Smart series. Installed between the chamber and a turbomolecular pump, it complements the pump’s water pumping speed without requiring an additional port. The KZ-08’s unique double-inverter technology allows for a mixed system configuration of cold traps and cryopumps on a single water-cooled compressor for higher productivity and energy savings.
Applications
Specifications
Water Pumping Speed | 1,200 liters/second | |
Conductance | Argon | 2,100 liters/second |
Nitrogen | 2,500 liters/second | |
Cooldown Time to 100 K1 | ≤30 Minutes | |
Warmup Time to 290 K1 | ≤30 Minutes | |
Weight | 30 kg (66.1 lbs.) | |
Dimensions (LxWxH) | 665 x 384 x 201 mm 26.2 x 15.1 x 7.9 in.) |
|
Flange | ICF 253 (both sides) |
Specifications subject to change without notice
- SICERA Smart KZ-08 Outline Drawing 133.8 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf