SICERA® Ultra KV-10 In-Line Cold Trap
Standard Scope of Supply
- KV-10 In-Line Cold Trap
- TM-30 or TM-50 Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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The SICERA® Ultra KV-10 In-Line Cold Trap is the only standard Cold Trap model in SHI’s SICERA Ultra series. Installed between the chamber and a turbomolecular pump, it complements the pump’s water pumping speed without requiring an additional port. The KV-10’s unique double-inverter technology allows for a mixed system configuration of cold traps and cryopumps on a single water-cooled compressor for higher productivity and energy savings.
Applications
Specifications
Water Pumping Speed | 6,000 liters/second |
Nitrogen Conductance | 2,000 liters/second |
Cooldown Time to 100 K1 | ≤70 Minutes |
Warmup Time to 310 K2 | ≤80 Minutes |
Weight | 32 kg (70.5 lbs.) |
Dimensions (LxWxH) | 607 x 375 x 206 mm (23.9 x 14.8 x 8.1 in.) |
Flange | ICF 305 (both sides; bolted flange connections) |
2 There are no condensed gasses.
Specifications subject to change without notice
- SICERA Ultra KV-10 Outline Drawing 118.9 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf