SICERA® Ultra KV-12 Cryopump
Standard Scope of Supply
- KV-12 Cryopump
- TM-30 or TM-50 Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Find Your Local OfficeRequest a QuoteAbout the KV-12
The SICERA® Ultra KV-12 Cryopump is the largest model in SHI’s SICERA Ultra series, and comprises of two versions specifically designed for ion implantation applications. The KV-12 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
Specifications
Model | KZ-12 Low | KZ-12 High | |
Pumping Speed | Water | 11,000 liters/second | |
Argon | 4,200 liters/second | 4,300 liters/second | |
Nitrogen | 5,000 liters/second | 5,200 liters/second | |
Hydrogen | 13,300 liters/second | 15,000 liters/second | |
Hydrogen Capacity | 40 standard liters | 45 standard liters | |
Crossover Rating | 40.0 Pa•m3 | ||
Regeneration Time | 165 Minutes | 225 Minutes | |
Weight | 40 kg (88.2 lbs.) | 44 kg (97.0 lbs.) | |
Dimensions (LxWxH) | 710 x 480 x 285 mm (28.0 x 18.9 x 11.2 in.) | 710 x 480 x 350 mm (28.0 x 18.9 x 13.8 in.) |
|
Inlet Flange | ISO 320 (clamped flange connection) |
Specifications subject to change without notice
- SICERA Ultra KV-12 Low Outline Drawing 136.1 KB - pdf
- SICERA Ultra KV-12 High Outline Drawing 160.3 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf