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SICERA® Ultra KV-12 Cryopump

Standard Scope of Supply

  • KV-12 Cryopump
  • TM-30 or TM-50 Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KV-12

The SICERA® Ultra KV-12 Cryopump is the largest model in SHI’s SICERA Ultra series, and comprises of two versions specifically designed for ion implantation applications.  The KV-12 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model. 

Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.


ModelKZ-12 LowKZ-12 High
Pumping SpeedWater11,000 liters/second
Argon4,200 liters/second4,300 liters/second
Nitrogen5,000 liters/second5,200 liters/second
Hydrogen13,300 liters/second15,000 liters/second
Hydrogen Capacity40 standard liters45 standard liters
Crossover Rating40.0 Pa•m3
Regeneration Time165 Minutes225 Minutes
Weight40 kg (88.2 lbs.)44 kg (97.0 lbs.)
Dimensions (LxWxH)710 x 480 x 285 mm
(28.0 x 18.9 x 11.2 in.)
710 x 480 x 350 mm
(28.0 x 18.9 x 13.8 in.)
Inlet FlangeISO 320 (clamped flange connection)

Specifications subject to change without notice

Compressor Options

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