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SICERA® Ultra KV-12 Cryopump

Standard Scope of Supply

KV-12 Cryopump
TM-30 or TM-50 Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KV-12

The SICERA® Ultra KV-12 Cryopump is the largest model in SHI’s SICERA Ultra series, and comprises of two versions specifically designed for ion implantation applications. The KV-12 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.

Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.

Applications

Specifications

Model		KZ-12 Low	KZ-12 High
Pumping Speed	Water	11,000 liters/second
	Argon	4,200 liters/second	4,300 liters/second
	Nitrogen	5,000 liters/second	5,200 liters/second
	Hydrogen	13,300 liters/second	15,000 liters/second
Hydrogen Capacity		40 standard liters	45 standard liters
Crossover Rating		40.0 Pa•m³
Regeneration Time		165 Minutes	225 Minutes
Weight		40 kg (88.2 lbs.)	44 kg (97.0 lbs.)
Dimensions (LxWxH)		710 x 480 x 285 mm (28.0 x 18.9 x 11.2 in.)	710 x 480 x 350 mm (28.0 x 18.9 x 13.8 in.)
Inlet Flange		ISO 320 (clamped flange connection)