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SICERA® Smart KZ-04 In-Situ Cold Trap

Standard Scope of Supply

KZ-04 In-Situ Cold Trap
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KZ-04

The SICERA® Smart KZ-04 In-Situ Cold Trap is the smaller model in SHI’s SICERA Smart series. The KZ-04’s in-situ design features the cold panel installed inside the vacuum chamber. This allows for variable water pumping speed as water vapor is trapped and condensed at 100 K. The KZ-04’s unique double-inverter technology allows for a mixed system configuration of cold traps and cryopumps on a single water-cooled compressor for higher productivity and energy savings.

Applications

Specifications

Water Pumping Speed	17,000 liters/second
Cooldown Time to 100 K	≤85 Minutes
Warmup Time to 310 K	≤105 Minutes
Weight	17 kg (37.5 lbs.)
Dimensions (LxWxH)	314 x 387 x 195 mm (12.4 x 15.2 x 7.7 in.)
Flange	ISO 100 (chamber side; bolted flange connection)