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SICERA® Smart KZ-06 In-Situ Cold Trap

Standard Scope of Supply

KZ-06 In-Situ Cold Trap
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the KZ-06

The SICERA® Smart KZ-06 In-Situ Cold Trap is the larger model in SHI’s SICERA Smart series. The KZ-06’s in-situ design features the cold panel installed inside the vacuum chamber. This allows for variable water pumping speed as water vapor is trapped and condensed at 100 K. The KZ-06’s unique double-inverter technology allows for a mixed system configuration of cold traps and cryopumps on a single water-cooled compressor for higher productivity and energy savings.

Applications

Specifications

Cooling Capacity	145 W @ 100 K
Lowest Temperature	70 K
Warmup Time to 310 K	≤105 Minutes
Weight	24 kg (52.9 lbs.)
Dimensions (LxWxH)	318 x 447 x 248 mm (12.5 x 17.6 x 9.8 in.)
Flange	ISO 160 (chamber side; clamped flange connection)