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SICERA® Smart KZ-06 In-Situ Cold Trap

Standard Scope of Supply

  • KZ-06 In-Situ Cold Trap
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KZ-06

The SICERA® Smart KZ-06 In-Situ Cold Trap is the larger model in SHI’s SICERA Smart series.  The KZ-06’s in-situ design features the cold panel installed inside the vacuum chamber.  This allows for variable water pumping speed as water vapor is trapped and condensed at 100 K.  The KZ-06’s unique double-inverter technology allows for a mixed system configuration of cold traps and cryopumps on a single water-cooled compressor for higher productivity and energy savings. 


Cooling Capacity145 W @ 100 K
Lowest Temperature70 K
Warmup Time to 310 K≤105 Minutes
Weight24 kg (52.9 lbs.)
Dimensions (LxWxH)318 x 447 x 248 mm
(12.5 x 17.6 x 9.8 in.)
FlangeISO 160 (chamber side; clamped flange connection)

Specifications subject to change without notice

Compressor Options

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