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Marathon® CP-16 Cryopump

Available Configurations

  • Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-16 Cryopump
  • F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.)  Cold Head Cable
  • Tool Kit

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About the Marathon® CP-16

The Marathon CP-16 Cryopump is one of SHI’s mid-size cryopumps in the Marathon CP series.  It utilizes SHI’s CH-208R 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with water-cooled helium compressors.


Pumping SpeedAir4,800 liters/second
Water17,300 liters/second
Argon4,100 liters/second
Hydrogen12,000 liters/second
ThroughputArgon11.4 torr-liters/second
(900 sccm)
(at 1×10-6 torr)
5,500 standard liters
(at 5×10-6 torr)
50 standard liters
Crossover Rating500 torr-liters
Cooldown Time to 20 K135 Minutes
Weight49.9 kg (110 lbs.)
Dimensions (H)633 mm (24.9 in.)
Maintenance13,000 Hours

Specifications subject to change without notice

Compressor Options

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