About the KV-08
The SICERA® Ultra KV-08 Cryopump is the smallest model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-08 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
|Pumping Speed||Water||4,000 liters/second|
|Throughput||Argon||1.2 Pa•m3/s (700 sccm)|
|Capacity||Argon||1,600 standard liters|
|Nitrogen||1,000 standard liters|
|Hydrogen||12 standard liters|
|Crossover Rating||20.0 Pa•m3|
|Base Pressure||<5E-7 Pa|
|Cooldown Time to 20 K1||≤75 Minutes|
|Warmup Time to 290 K1||≤45 Minutes|
|Weight||28 kg (61.7 lbs.)|
|Dimensions (LxWxH)||612 x 448 x 230 mm
(24.1 x 17.6 x 9.1 in.)
Specifications subject to change without notice