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Marathon® CP-12 Cryopump

Available Configurations

  • Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-12 Cryopump
  • F-40L/H or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.)  Cold Head Cable
  • Tool Kit

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About the Marathon® CP-12

The Marathon CP-12 Cryopump is one of SHI’s mid-size cryopumps in the Marathon CP series.  It utilizes SHI’s CH-208L 10K Cryocooler, featuring Whisper® technology for quieter operation, and Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with water-cooled helium compressors.


Pumping SpeedAir3,600 liters/second
Water9,560 liters/second
Argon3,100 liters/second
Hydrogen7,300 liters/second
ThroughputArgon12.6 torr-liters/second
(1000 sccm)
(at 1×10-6 torr)
3,100 standard liters
(at 5×10-6 torr)
50 standard liters
Crossover Rating650 torr-liters
Cooldown Time to 20 K90 Minutes
Weight40.8 kg (90 lbs.)
Dimensions (H)600 mm (23.5 in.)
Maintenance13,000 Hours

Specifications subject to change without notice

Compressor Options

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