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SICERA® Smart KZ-08 Cryopump

Standard Scope of Supply

  • KZ-08 Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KZ-08

The SICERA® Smart KZ-08 Cryopump is the smallest model in SHI’s SICERA Smart series.  Designed for PVD applications, the KZ-08’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.


Pumping SpeedWater4,000 liters/second
Argon1,200 liters/second
Nitrogen1,500 liters/second
Hydrogen2,200 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)
CapacityArgon1,000 standard liters
Nitrogen900 standard liters
Hydrogen12 standard liters
Mixture600 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<5E-7 Pa
Cooldown Time to 20 K1≤70 Minutes
Warmup Time to 290 K1≤30 Minutes
Weight28 kg (61.7 lbs.)
Dimensions (LxWxH)612 x 384 x 230 mm
(24.1 x 15.1 x 9.1 in.)
Inlet FlangeICF253
1 Regardless of number of cryopumps operating.

Specifications subject to change without notice

Compressor Options

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