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SICERA® Smart KZ-10 Cryopump

Standard Scope of Supply

  • KZ-10 Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KZ-10

The SICERA® Smart KZ-10 Cryopump is SHI’s mid-size model in the SICERA Smart series.  With versions specially designed for PVD or ion implantation applications, the KZ-10’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.


ModelKZ-10 for PVDKZ-10 for Ion Implant
Pumping SpeedWater6,500 liters/second
Argon1,900 liters/second1,990 liters/second
Nitrogen2,300 liters/second2,650 liters/second
Hydrogen1,800 liters/second6,360 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)1.0Pa•m3/s (600 sccm)
CapacityArgon2,000 standard liters-
Hydrogen16 standard liters24 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<1.0E-6 Pa<5.0E-6 Pa
Cooldown Time to 20 K≤85 Minutes≤130 Minutes
Warmup Time to 290 K≤45 Minutes1≤35 Minutes2
Weight31 kg (68.3 lbs.)28 kg (61.7 lbs.)
Dimensions (LxWxH)654 x 335 x 466 mm
(25.7 x 13.2 x 18.3 in.)
633 x 460 x 279 mm
(24.9 x 18.1 x 11.0 in.)
Inlet FlangeISO 250 (bolted flange connection)ISO 250 (clamped flange connection)
1 The supply pressure of the N2 purge is 0.55MPaG. There are no condensed gasses.
2 Warmup time to 280 K, if gas is not absorbed.

Specifications subject to change without notice

Compressor Options

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