Products

SICERA® KZ-12L Cryopump

Available Configurations

  • ANSI 10 in. Flange
  • Standard Fully-Automated Operation
  • SHI Proprietary Inverter Technology

Standard Scope of Supply

  • KZ-12L Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

CALL YOUR LOCAL OFFICEFOR MORE INFORMATION

SICERA-KZ-12L
SUGGESTED APPLICATIONS
Specifications
Pumping Speed Air 4,500 liters/second
Water 9,500 liters/second
Argon 3,500 liters/second
Hydrogen 5,500 liters/second
Throughput Argon 11.3 torr-liters/second
(900 sccm)
Capacity Argon (at 1×10-6 torr) 2,000 standard liters
Hydrogen (at 5×10-6 torr) 35 standard liters
Crossover Rating 150 torr-liters
Cooldown Time 100 Minutes
Weight 40 kg (88.2 lbs.)
Dimensions (HxWxD) 230 x 518 x 689 mm
(9.1 x 20.4 x 27.1 in.)
Maintenance 12,000 Hours
Inlet Flange ANSI 10 in.

 

Specifications subject to change without notice.