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Sumitomo Cryogenics Group

SHI Cryogenics Group, a global manufacturer that includes the Cryogenics Division of Sumitomo Heavy Industries, Ltd. and the former APD Cryogenics, delivers innovative solutions to the semiconductor, research, optical coating, and medical industries.  

 

With offices in Japan, Europe and the United States, it has been producing quality cryogenic equipment for 50 years.  SHI Cryogenics Group serves its customers with facilities around the world, while its renowned engineering departments in the United States and Japan continue to focus on the latest cryogenics technologies, including innovative cryopump and cryocooler designs.

 

In addition to cryopumps and both 4K and 10K cryocooolers, SHI Cryogenics Group manufactures pulse tubes, shield coolers and laboratory cryostats.  As always, customers benefit from performance reliability, leading edge technology and a global sales and support network.  

 

 
 

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For SHI, APD and Daikin product service and support, visit the Service Page to find your local service center.  Support options include: 

- Exchange programs - On-site service
- Spare parts - Service depot repair
- Customer training - Service contracts
 

NEW PRODUCTS

Marathon® CP-20 Cryopump  

The high-capacity CP-20 is designed for large vacuum chambers and is offered with an ANSI 20" or an ISO 500mm flange.  It can be readily-maintained without breaking vacuum or removing the cryopump from the chamber.  Additionally, the optional Marathon Cryopump Controller enables fully-automatic control of the cryopump.  Click here for more information.

CH-110 77K Cryocooler

The CH-110 is a single stage, high-capacity refrigerator desiged for use in a variety of lab applications.  Offers 175/200 W @ 77 K (50/60 Hz).  Click here for more information. 

CH-104 77K Cryocoolers

The CH-104 is a single-stage, refrigerator designed for use in a variety of lab applications.  Offers 29/35 W @ 77 K (50/60 Hz).  Click here for more information.