SICERA® Smart KZ-12 Cryopump
Standard Scope of Supply
- KZ-12 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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The SICERA® Smart KZ-12 Cryopump is the largest model in SHI’s SICERA Smart series. With versions specially designed for PVD or ion implantation applications, the KZ-12’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.
Applications
Specifications
Model | KZ-12 for PVD | KZ-12 for Ion Implant | |
Pumping Speed | Water | 11,000 liters/second | |
Argon | 1,900 liters/second | 3,470 liters/second | |
Nitrogen | 2,300 liters/second | 4,470 liters/second | |
Hydrogen | 1,800 liters/second | 11,330 liters/second | |
Throughput | Argon | 1.2 Pa•m3/s (700 sccm) | 1.5 Pa•m3/s (900 sccm) |
Capacity | Argon | 3,500 standard liters | - |
Hydrogen | 16 standard liters | 35 standard liters | |
Base Pressure | <1.0E-6 Pa | <5.0E-6 Pa | |
Cooldown Time to 20 K | ≤135 Minutes | ≤170 Minutes | |
Warmup Time to 290 K1 | ≤55 Minutes | ≤35 Minutes2 | |
Weight | 55 kg (121.3 lbs.) | 32 kg (70.5 lbs.) | |
Dimensions (LxWxH) | 735 x 425 x 493 mm (28.9 x 16.7 x 19.4 in.) | 673 x 463 x 450 mm (26.5 x 18.2 x 17.7 in.) |
|
Inlet Flange | ISO 320 (bolted flange connection) | ISO 320 (clamped flange connection) | |
Maintenance | 16,000 Hours |
2 Warmup time to 280 K, if gas is not absorbed.
Specifications subject to change without notice
- SICERA Smart KZ-12 Outline Drawing (PVD) 123.0 KB - pdf
- SICERA Smart KZ-12 Outline Drawing (I/I) 128.2 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf