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SIGNET® Smart SG-12 Cryopump

Standard Scope of Supply

  • SG-12 Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the SG-12

The SIGNET® Smart SG-12 Cryopump is the largest model in the SIGNET Smart series.  Designed for use in sputtering and evaporation systems, it has high argon capacity and features SHI’s patented double-inverter technology.  This allows up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation, improving pumping performance stability through control of both the cold head and the compressor motor speeds, while offering increased energy savings with a reduced footprint.

Specifications

Pumping SpeedWater11,000 liters/second
Argon3,000 liters/second
Nitrogen3,600 liters/second
Hydrogen4,800 liters/second
ThroughputArgon0.8 Pa•m3/s (500 sccm)
CapacityArgon5,000 standard liters
Hydrogen16 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<1.0E-6 Pa
Cooldown Time to 17 K≤130 Minutes
Warmup Time to 290 K1≤60 Minutes
Weight49 kg (108.0 lbs.)
Dimensions (LxWxH)723 x 497 x 390 mm
(28.5 x 19.65 x 15.4 in.)
Inlet FlangeVG300
1 The supply pressure of the N2 purge is 0.5MPaG. There are no condensed gasses.

Specifications subject to change without notice

Compressor Options

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