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SIGNET® Smart SG-10 Cryopump

Standard Scope of Supply

  • SG-10 Cryopump
  • CSW-61C/D Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the SG-10

The SIGNET® Smart SG-10 Cryopump is the mid-size model in the SIGNET Smart series.  Designed for use in sputtering and evaporation systems, the SG-10’s unique double-inverter technology allows up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.  This technology improves pumping performance stability through control of both the cold head and the compressor motor speeds, and offers increased energy savings with a reduced footprint.

Specifications

Pumping SpeedWater6,500 liters/second
Argon1,900 liters/second
Nitrogen2,300 liters/second
Hydrogen1,800 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)
CapacityArgon2,000 standard liters
Hydrogen16 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<1.0E-6 Pa
Cooldown Time to 17 K≤105 Minutes
Warmup Time to 290 K1≤45 Minutes
Weight30 kg (66.1 lbs.)
Dimensions (LxWxH)661 x 496 x 243 mm
(26.0 x 19.5 x 9.6 in.)
Inlet FlangeVG250
1 The supply pressure of the N2 purge is 0.5MPaG. There are no condensed gasses.

Specifications subject to change without notice

Compressor Options

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