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SIGNET® Smart SG-10 Cryopump

Standard Scope of Supply

SG-10 Cryopump
CSW-61C/D Compressor
Remote Cryopump Controller with RS-485 Cables
Flexible Gas Lines
Power Cables

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About the SG-10

The SIGNET® Smart SG-10 Cryopump is the mid-size model in the SIGNET Smart series. Designed for use in sputtering and evaporation systems, the SG-10’s unique double-inverter technology allows up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation. This technology improves pumping performance stability through control of both the cold head and the compressor motor speeds, and offers increased energy savings with a reduced footprint.

Applications

Specifications

Pumping Speed	Water	6,500 liters/second
	Argon	1,900 liters/second
	Nitrogen	2,300 liters/second
	Hydrogen	1,800 liters/second
Throughput	Argon	1.2 Pa•m³/s (700 sccm)
Capacity	Argon	2,000 standard liters
Capacity	Hydrogen	16 standard liters
Crossover Rating		20.0 Pa•m³
Base Pressure		<1.0E-6 Pa
Cooldown Time to 17 K		≤105 Minutes
Warmup Time to 290 K¹		≤45 Minutes
Weight		30 kg (66.1 lbs.)
Dimensions (LxWxH)		661 x 496 x 243 mm (26.0 x 19.5 x 9.6 in.)
Inlet Flange		VG250