SIGNET® Smart SG-10 Cryopump
Standard Scope of Supply
- SG-10 Cryopump
- CSW-61C/D Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Find Your Local OfficeRequest a QuoteAbout the SG-10
The SIGNET® Smart SG-10 Cryopump is the mid-size model in the SIGNET Smart series. Designed for use in sputtering and evaporation systems, the SG-10’s unique double-inverter technology allows up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation. This technology improves pumping performance stability through control of both the cold head and the compressor motor speeds, and offers increased energy savings with a reduced footprint.
Applications
Specifications
Pumping Speed | Water | 6,500 liters/second |
Argon | 1,900 liters/second | |
Nitrogen | 2,300 liters/second | |
Hydrogen | 1,800 liters/second | |
Throughput | Argon | 1.2 Pa•m3/s (700 sccm) |
Capacity | Argon | 2,000 standard liters |
Hydrogen | 16 standard liters | |
Crossover Rating | 20.0 Pa•m3 | |
Base Pressure | <1.0E-6 Pa | |
Cooldown Time to 17 K | ≤105 Minutes | |
Warmup Time to 290 K1 | ≤45 Minutes | |
Weight | 30 kg (66.1 lbs.) | |
Dimensions (LxWxH) | 661 x 496 x 243 mm (26.0 x 19.5 x 9.6 in.) |
|
Inlet Flange | VG250 |
Specifications subject to change without notice
- SIGNET Smart SG-10 Outline Drawing 158.7 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf