APD/Marathon/CP Service

APD, Marathon® and Marathon CP Series Cryopumps Service Options

APD, Marathon and CP Series Cryopumps can be serviced via “hot swap” on-site by the customer or an SHI factory-trained technician, without breaking vacuum or removing the cryopump from the chamber for return or replacement.  This unique service option is the result of the high-quality, ultra-reliable Displex® Cryocooler technology found in all APD, Marathon and CP Series Cryopumps.  Displex Cryocoolers have a long and successful operating history, and feature a pneumatic drive that optimizes performance, reliability and maintainability. 

Performing hot swap service lowers the total cost of ownership by:

  • Eliminating the cost of shipping a complete cryopump to a service center
  • Eliminating labor costs associated with complete disassembly of the cryopump from your system
  • Minimizing the “down time” of your system for service or repair
  • Minimizing the required capital investment in spare parts

In addition, these cryopumps can be returned to one of SHI’s service centers.  Product repairs and refurbishments performed at SHI Service Centers include:

  • Flow check of all internal parts to ensure optimum refrigeration capacity
  • Replacement of required wear items-seals, valve disc, valve stem, capillaries and displacers-when necessary
  • Performance testing to factory specification
  • Leak check, both pressurized and for vacuum integrity, where applicable
  • Replacement or repair of vacuum components-chevron, 1st stage cryopanel, 2nd stage charcoal arrays-when necessary
  • Full factory warranty

Service and Support

With product service centers located in strategic locations around the world, we can offer the fastest turnaround to our customers while lowering your shipping costs.

Global Offices