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SICERA® Ultra KV-08 Cryopump

Standard Scope of Supply

  • KV-08 Cryopump
  • TM-30 or TM-50 Compressor
  • Remote Cryopump Controller with RS-485 Cables
  • Flexible Gas Lines
  • Power Cables

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About the KV-08

The SICERA® Ultra KV-08 Cryopump is the smallest model in SHI’s SICERA Ultra series, and is designed for PVD applications.  The KV-08 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model. 

Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.

Specifications

Pumping SpeedWater4,000 liters/second
Argon1,200 liters/second
Nitrogen1,500 liters/second
Hydrogen2,200 liters/second
ThroughputArgon1.2 Pa•m3/s (700 sccm)
CapacityArgon1,600 standard liters
Nitrogen1,000 standard liters
Hydrogen12 standard liters
Crossover Rating20.0 Pa•m3
Base Pressure<5E-7 Pa
Cooldown Time to 20 K1≤75 Minutes
Warmup Time to 290 K1≤45 Minutes
Weight28 kg (61.7 lbs.)
Dimensions (LxWxH)612 x 448 x 230 mm
(24.1 x 17.6 x 9.1 in.)
Inlet FlangeICF253
1 Regardless of number of cryopumps operating.

Specifications subject to change without notice

Compressor Options

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