SICERA® Cryopumps and Compressors are designed with SHI’s proprietary inverter technology to greatly reduce customer energy costs. Our proprietary design also results in longer uptime, while maintaining transparent process conditions. The resulting savings and increased throughput make SICERA® ideal for semiconductor-related manufacturing.
|Argon Throughput||torr liters/second||8.8||11.3||N/A|
|Argon Capacity||standard liters @ 1 x10-6 torr||1,000||2,000||N/A|
|Hydrogen Capacity||standard liters @ 5 x10-6 torr||16||35||N/A|
|Weight||kg (lbs.)||32 (70.6)||40 (88.2)||32 (70.6)|
|Inlet Flange||ANSI||N/A||10 in.||N/A|
|Metal Seal (Conflat)||N/A||N/A||N/A|
|ICF||253 mm||N/A||253 mm|
Specifications subject to change without notice.
Service and Support
With product service centers located in strategic locations around the world, we can offer the fastest turnaround to our customers while lowering your shipping costs.Global Offices