SICERA® Cryopumps

SICERA® Cryopumps and Compressors are designed with SHI’s proprietary inverter technology to greatly reduce customer energy costs. Our proprietary design also results in longer uptime, while maintaining transparent process conditions. The resulting savings and increased throughput make SICERA® ideal for semiconductor-related manufacturing.


Specifications
Cryopump Model
SICERA®
KZ-8L KZ-12L Water Trap
Air liters/second 1,500 4,500 N/A
Water liters/second 4,000 9,500 3,400
Argon liters/second 1,200 3,500 N/A
Hydrogen liters/second 2,200 5,500 N/A
Argon Throughput torr liters/second 8.8 11.3 N/A
sccm 700 900 N/A
Argon Capacity standard liters @ 1 x10-6 torr 1,000 2,000 N/A
Hydrogen Capacity standard liters @ 5 x10-6 torr 16 35 N/A
Crossover Rating torr-liters 150 150 N/A
Cooldown Time minutes 70 100 30
Weight kg (lbs.) 32 (70.6) 40 (88.2) 32 (70.6)
Inlet Flange ANSI N/A 10 in. N/A
ISO N/A N/A N/A
Metal Seal (Conflat) N/A N/A N/A
CVC N/A N/A N/A
ICF 253 mm N/A 253 mm

Specifications subject to change without notice.

Options
KZ-8L KZ-12L Water Trap
CSW-61

Service and Support

With product service centers located in strategic locations around the world, we can offer the fastest turnaround to our customers while lowering your shipping costs.

Global Offices