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Marathon® CP-8 Cryopump

Available Configurations

  • Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Two (2) cryopumps operating with one (1) F-70L/H Compressor
  • Displex® Technology

Standard Scope of Supply

  • CP-8 Cryopump
  • F-20L or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.)  Cold Head Cable
  • Tool Kit

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About the Marathon® CP-8

The Marathon CP-8 Cryopump is one of SHI’s smallest cryopumps in the Marathon CP series.  It utilizes SHI’s CH-204 10K Cryocooler and features Displex® pneumatic drive technology, limiting the number of wear parts in the refrigerator.  It can be serviced in-situ, without breaking vacuum or removing the pump from the chamber.  It operates with water-cooled helium compressors.

Specifications

Pumping SpeedAir1,500 liters/second
Water4,200 liters/second
Argon1,250 liters/second
Hydrogen2,300 liters/second
ThroughputArgon11.0 torr-liters/second
(870 sccm)
CapacityArgon
(at 1×10-6 torr)
1,200 standard liters
Hydrogen
(at 5×10-6 torr)
25 standard liters
Crossover Rating220 torr-liters
Cooldown Time to 20 K75 Minutes
Weight16.8 kg (37 lbs.)
Dimensions (H)516 mm (20.3 in.)
Maintenance13,000 Hours

Specifications subject to change without notice

Compressor Options

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