Marathon® CP Cryopumps

SHI offers a wide range of Cryopump products.  Marathon® CP Series Cryopumps are offered with standard and low profile enclosures, all industry-standard flanges and both manual and automatic features. They can be serviced via “hot swap” without breaking vacuum, which allows for greater system up-time.

Specifications
Cryopump Model
Marathon® CP
CP-8 CP-8LP CP-250LP CP-12 CP-16 CP-20
Air liters/second 1,500 1,800 3,000 3,600 4,800 9,700
Water liters/second 4,200 4,200 6,300 9,560 17,300 29,100
Argon liters/second 1,250 1,500 2,500 3,100 4,100 8,300
Hydrogen liters/second 2,300 3,000 5,000 7,300 12,000 14,000
Argon Throughput torr liters/second 11.0 11.0 11.0 12.6 11.4 11.3
sccm 870 870 870 1,000 900 895
Argon Capacity standard liters @ 1 x10-6 torr 1,200 1,600 1,600 3,100 5,500 6,000
Hydrogen Capacity standard liters @ 5 x10-6 torr 25 23 30 50 50 33
Crossover Rating torr-liters 220 220 300 650 500 400
Cooldown Time minutes 75 110 110 90 135 190
Weight kg (lbs.) 16.8 (37) 17.9 (39.5) 20 (44) 40.8 (90) 49.9 (110) 77.1 (170)

Specifications subject to change without notice.

Options
CP-8 CP-8LP CP-250LP CP-12 CP-16 CP-20
HC-4E
HC-8E
F-70
Zephyr®

Service and Support

With product service centers located in strategic locations around the world, we can offer the fastest turnaround to our customers while lowering your shipping costs.

Global Offices