SHI offers a wide range of Cryopump products. Marathon® CP Series Cryopumps are offered with standard and low profile enclosures, all industry-standard flanges and both manual and automatic features. They can be serviced via “hot swap” without breaking vacuum, which allows for greater system up-time.
|Argon Throughput||torr liters/second||11.0||11.0||11.0||12.6||11.4||11.3|
|Argon Capacity||standard liters @ 1 x10-6 torr||1,200||1,600||1,600||3,100||5,500||6,000|
|Hydrogen Capacity||standard liters @ 5 x10-6 torr||25||23||30||50||50||33|
|Weight||kg (lbs.)||16.8 (37)||17.9 (39.5)||20 (44)||40.8 (90)||49.9 (110)||77.1 (170)|
Specifications subject to change without notice.
Service and Support
With product service centers located in strategic locations around the world, we can offer the fastest turnaround to our customers while lowering your shipping costs.Global Offices