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Cryopump Specification Chart
 

CP-8

CP-8LP

CP-250LP

CP-12

CP-16

CP-20

SICERA 8"

SICERA 12"

Pumping Speed

(liters/second)

Air

1500

1800

3060

3600

4800

9700

1500

3300

Water

4200

4200

6300

9860

17,300

29,100

4000

9500

Argon

1250

1500

2500

3100

4100

8300

1200

2700

Hydrogen

2300

3000

5000

7300

12,000

14,000

2200

6000

Throughput

Argon (torr-liters/second)

11.0

11.0

11.0

12.6

11.4

1.3

8.9

8.9

Argon

(sccm)

870

870

870

1000

900

900

700

700

Capacity

(standard liters)

Argon @       1 x 10-6 torr

1200

1600

1600

3100

5500

6000

1000

2000

Hydrogen @ 5 x 10-6 torr

25

25

25

50

50

33

12

30

Crossover (torr-liters)

220

220

220

650

500

400

150

150

Cooldown Time (minutes)

75

110

110

90

135

190

120

150

Inlet FlangeANSI

6"

6"

N/A

10"

N/A

20"

N/A

N/A

ISO

200 mm

200 mm

250 mm

320 mm

400 mm

500 mm

N/A

N/A

Metal Seal (Conflat)

10"

10"

N/A

N/A

N/A

N/A

253 mm

 
CVC

N/A

N/A

N/A

10"

10"

N/A

N/A

N/A

Note: Pump inlet flange is not price dependent

Specifications subject to change without notice.