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 SICERA 12" Cryopump

Model

SICERA™ 12"

Pumping Speed 

Air

3300 liters/second

Water

9500 liters/second

Argon

2700 liters/second

Hydrogen

6000 liters/second

ThroughputArgon 

8.9 torr-liters/second

(700 sccm)

Capacity 

Argon @ 1x10-6 torr

2000 standard liters

Hydrogen @ 5x10-6 torr 

30 standard liters

Crossover

150 torr-liters

Cooldown Time

150 Min.

Inlet FlangeMetal Seal (Conflat)

 

CompressorModel 

CSW-61C or CSW-61D

Weight

130 kg

(287 lbs.)

Maintenance Interval

30,000 Hours 

Electrical Power

3 Phase

200-230 V, 50/60 Hz (61C)

or

420-480 V, 50/60 Hz (61D) 

Power Consumption

 1.5 kW/pump

Specifications subject to change without notice.
 

 SICERA 8" Cryopump

Model

SICERA™ 8"

Pumping Speed 

Air

1500 liters/second

Water

4000 liters/second

Argon

1200 liters/second

Hydrogen

2200 liters/second

ThroughputArgon 

8.9 torr-liters/second

(700 sccm)

Capacity 

Argon @ 1x10-6 torr

1000 standard liters

Hydrogen @ 5x10-6 torr 

12 standard liters

Crossover

150 torr-liters

Cooldown Time

120 Min.

Inlet FlangeMetal Seal (Conflat)

253 mm

Height

230 mm

(9.1 in.)

Length

615 mm

(24.2 in.)

Weight

32 kg

(70.5 lbs.) 

CompressorModel 

CSW-61C or CSW-61D

Weight

130 kg

(287 lbs.)

Maintenance Interval

30,000 Hours 

Electrical Power

3 Phase

200-230 V, 50/60 Hz (61C)

or

420-480 V, 50/60 Hz (61D) 

Power Consumption

0.9 kW/pump

Specifications subject to change without notice.
 

Marathon CP-20 Cryopump

Model

CP-20

Pumping Speed 

Air

9700 liters/second

Water

29,100 liters/second

Argon

8300 liters/second

Hydrogen

14,000 liters/second

Throughput Argon 

11.3 torr-liters/second

(900 sccm)

Capacity 

Argon @ 1x10-6 torr

6000 standard liters

Hydrogen @ 5x10-6 torr 

33 standard liters

Crossover

400 torr-liters

Cooldown Time

190 Min.

Inlet Flange ANSI 

20"

ISO

500 mm

Metal Seal (Conflat)

N/A

CVC

N/A

Height

569 mm

(22.4 in.)

Weight

77 kg

(170 lbs.) 

Compressor Model 

F-70L or F-70H

Weight

 100 kg

(225 lbs.)

Maintenance Interval

30,000 Hours 

Electrical Power

 3 Phase
200 V, 50/60 Hz
(Low Voltage)

380-415 V, 50Hz
480 V, 60 Hz
(High Voltage)

Power Consumption (50/60 Hz)

6.6-6.9/7.5-7.8 kW

Specifications subject to change without notice.

 

Marathon CP-16 Cryopump

Model

CP-16

Pumping Speed 

Air

4800 liters/second

Water

17,300 liters/second

Argon

4100 liters/second

Hydrogen

12,000 liters/second

Throughput Argon 

11.4 torr-liters/second

(900 sccm)

Capacity 

Argon @ 1x10-6 torr

5500 standard liters

Hydrogen @ 5x10-6 torr 

50 standard liters

Crossover

500 torr-liters

Cooldown Time

135 Min.

Inlet Flange ANSI 

N/A

ISO

400 mm

Metal Seal (Conflat)

N/A

CVC

10"

Height

633 mm

(24.9 in.)

Weight

50 kg

(110 lbs.) 

Compressor Model 

HC-8E4

F-70L or F-70H

Weight

 75 kg

(165 lbs.) 

 100 kg

(225 lbs.)

Maintenance Interval

30,000 Hours  

30,000 Hours 

Electrical Power

 3 Phase
220 V,  50 Hz
220/230 V, 60 Hz

 3 Phase
200 V, 50/60 Hz
(Low Voltage)

380-415 V, 50Hz
480 V, 60 Hz
(High Voltage)

Power Consumption (50/60 Hz)

 3.7/4.3 kW

6.6-6.9/7.5-7.8 kW

Specifications subject to change without notice.

 

 Marathon CP-12 Cryopump

Model

CP-12

Pumping Speed 

Air

3600 liters/second

Water

9560 liters/second

Argon

3100 liters/second

Hydrogen

7300 liters/second

ThroughputArgon 

12.6 torr-liters/second

(1000 sccm)

Capacity 

Argon @ 1x10-6 torr

3100 standard liters

Hydrogen @ 5x10-6 torr 

50 standard liters

Crossover

650 torr-liters

Cooldown Time

90 Min.

Inlet FlangeANSI 

10"

ISO

320 mm

Metal Seal (Conflat)

N/A

CVC

10"

Height

600 mm

(23.5 in.)

Weight

41 kg

(90 lbs.) 

CompressorModel 

HC-8E4

F-70L or F-70H

Weight

 75 kg

(165 lbs.) 

 100 kg

(225 lbs.)

Maintenance Interval

30,000 Hours  

30,000 Hours 

Electrical Power

 3 Phase
220 V,  50 Hz
220/230 V, 60 Hz

 3 Phase
200 V, 50/60 Hz
(Low Voltage)

380-415 V, 50Hz
480 V, 60 Hz
(High Voltage)

Power Consumption (50/60 Hz)

 3.7/4.3 kW

6.6-6.9/7.5-7.8 kW

Specifications subject to change without notice.

 
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