SHI Cryogenics Group invented the cryopump in the 1970s and today remains the recognized innovator of cryopumps for high and ultra-high vacuum applications.  Both our Marathon® CP and SICERA™ Cryopump lines are ideally designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies. 

Marathon^® CP Cryopumps

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes.  Applications for these versatile systems range from custom laboratory equipment to industrial-scale tools.  Manufacturers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and a wide range of coating and thermal vacuum systems require efficient, reliable and robust systems, which offer a low cost of ownership. The Marathon CP Cryopump delivers on all fronts.

The full line of Marathon CP Cryopumps includes 8 in. (200mm) through 20 in. (500 mm) models.  A range of standard and low profile encloses; ANSI, ISO and CF flanges; as well as manual and fully-automatic features, ensure that users have modularity and flexibility to choose from when designing their system.

Like all SHI products, the Marathon CP Cryopumps are supported by a worldwide sales and support network.  They can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement.  As a result, their easy serviceability maximizes production uptime and lowers the total cost of ownership.

Marathon^® Cryopump Controller

For users requiring the latest in efficient, fully-automated operation, SHI Cryogenic Group offers the Marathon® Cryopump Controller (MCC).  The MCC enables fully-automatic operation of the Marathon CP Cryopumps using commands from a host computer and industry-standard cryopump protocol.  If you do not utilize a host computer, optional software is available to interface the MCC to a standard Windows-based computer.  The result of utilizing the Marathon Cryopump with MCC is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user's process.

SICERA™ Cryopump

At only 0.9 kW per pump, and using SHI proprietary inverter technology, SICERA redefines the meaning of "low energy consumption" by reducing customer energy costs 20-30%.  The breakthrough multi-pump system allows up to six (6) 8 in. (200 mm) pumps to run on a single compressor without performance degradation. 

SICERA is available in 8 in. and 12 in. (300 mm) sizes, with both models having fully-automated regeneration cycles to maximize production uptime.  The resulting savings and increased production efficiency make them ideal for high-volume semiconductor wafer, flat panel display and related processing.

Apart from the cryopump(s), the complete SICERA system includes a compressor and a remote controller.  All have been thoroughly tested to withstand the most demanding vacuum applications, thereby allowing a maximum of ten cryopumps and two compressors to operate simultaneously through a single controller.  By continuously controlling both the cryocooler and the compressor operating frequencies, SHI Cryogenics Group is able to offer a reliable cryopump system with significant energy savings, as well as excellent temperature and vacuum stability.