Patents

The SHI Cryogenics Group, an integral part of the Precision Equipment Division of Sumitomo Heavy Industries, Ltd., is a leading worldwide provider of innovative cryogenic and vacuum solutions to the medical, semiconductor, flat panel, general coating and research industries. SHI’s renowned engineering departments continue to focus on the latest cryogenic and vacuum technologies, including patented cryopump and cryocooler designs.   

Patent Listings by Model:  Click Here to Download

 

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