SICERA® Ultra KV-08 Cryopump
Standard Scope of Supply
- KV-08 Cryopump
- TM-30 or TM-50 Compressor
- Remote Cryopump Controller with RS-485 Cables
- Flexible Gas Lines
- Power Cables
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Find Your Local OfficeRequest a QuoteAbout the KV-08
The SICERA® Ultra KV-08 Cryopump is the smallest model in SHI’s SICERA Ultra series, and is designed for PVD applications. The KV-08 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model.
Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.
Applications
Specifications
Pumping Speed | Water | 4,000 liters/second |
Argon | 1,200 liters/second | |
Nitrogen | 1,500 liters/second | |
Hydrogen | 2,200 liters/second | |
Throughput | Argon | 1.2 Pa•m3/s (700 sccm) |
Capacity | Argon | 1,600 standard liters |
Nitrogen | 1,000 standard liters | |
Hydrogen | 12 standard liters | |
Crossover Rating | 20.0 Pa•m3 | |
Base Pressure | <5E-7 Pa | |
Cooldown Time to 20 K1 | ≤75 Minutes | |
Warmup Time to 290 K1 | ≤45 Minutes | |
Weight | 28 kg (61.7 lbs.) | |
Dimensions (LxWxH) | 612 x 448 x 230 mm (24.1 x 17.6 x 9.1 in.) |
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Inlet Flange | ICF253 |
Specifications subject to change without notice
- SICERA Ultra KV-08 Outline Drawing 171.7 KB - pdf
- Basics of Cryopumping Booklet – English 2.4 MB - pdf